Electron Beam Lithography System Service

Labour including all onsite visits. 1. Contract coverage: Machine fault downtime less than 12% of the year and averaging in 3 years. Extend the warranty by two days for one day over the target. Installation and operation conditions in document "Installation Requirements". Warranty excludes damages from incorrect operations or conditions. However, the warrant will include. recover work from power cuts twice per year. minor damages due to users' operation mistakes. Service and support: Response to service requests within 24 hours. Onsite services only conducted when jobs cannot be done remotely.