AwardedCHEGoods
Dünnschicht-Cluster-Abscheidungssystem für das Sputtern von Metallen und Dielektrika
- Published
- Published 3 December 2024
- Deadline
- Closed 20 January 2025
Overview
Dünnschicht-Cluster-Beschichtungsanlage für das Sputtern von Metallen und Dielektrika Clusteranlage mit einer Schleuse und 4 Prozesskammern (PCs) für das DC- und RF-Sputtern von Dielektrika und Metallen auf Halbleiter- und anderen Substraten. Details entnehmen Sie bitte unserer Spezifikation.
Key details
- Country
- CHE
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- Published
- 3 December 2024
- Deadline
- Closed
Laboratory, optical and precision equipments (excl. glasses)
Award outcome
- Awarded value
- CHF 2,870,055
- Award date
- 19 November 2025
- Contract period
- 21 January 2025 → 30 June 2027
- DE_Evatec AG
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
20 November 2025
Contract Notice
3 December 2024
Contracting authority
ETH Zürich - Abt. Procurement & Export Services
Procuring entityZürich, CHE
Authority website ↗
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