AwardedGermanyGoods
maskenloses UV-Direktlithographie-System
- Published
- Published 22 May 2026
- Deadline
- Closed 25 June 2026
Overview
Friedrich-Schiller-Universität Jena procured a compact maskless UV direct lithography system suitable for cleanroom use, capable of both raster-based full-area exposure and vector-based direct exposure modes for research, development, and small-series prototyping of micro- and nanostructures. Heidelberg Instruments Mikrotechnik GmbH won the contract on 14 July 2026 for €190,785.
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- No
- Published
- 22 May 2026
- Deadline
- Closed
Laboratory, optical and precision equipments (excl. glasses)
Award outcome
- Awarded value
- €190,785
- Award date
- 14 July 2026
- Heidelberg Instruments Mikrotechnik GmbH
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
15 July 2026
Contract Notice
22 May 2026
Contracting authority
Friedrich-Schiller-Universität Jena
Procuring entityJena, Germany
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