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AwardedGermanyGoods

300mm fully automated high resolution in-line CD and overlay (IZM-133.1) - PR1191754-3460-P

Published
Published 8 April 2026

Overview

Fraunhofer-Gesellschaft procured a 300mm fully automated high resolution in-line CD (critical dimension) and overlay measurement system (IZM-133.1). The contract was awarded on 6 July 2026 to MueTec Automatisierte Mikroskopie und Messtechnik GmbH.

Key details

Country
Germany
Status
Awarded
Category
Goods
Procedure
Limited
SME suitable
Yes
Published
8 April 2026
Classification (CPV)
Microelectronic machinery and apparatus

Award outcome

Awarded value
-€1
Award date
6 July 2026
Contract period
17 May 2027 → 21 May 2027
Winner
  • MueTec Automatisierte Mikroskopie und Messtechnik GmbH

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Notice history

Every published notice in this contracting process, newest first.

  1. Contract Award Notice

    8 July 2026

  2. Contract Notice

    8 April 2026

Contracting authority

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Awarded: 300mm fully automated high resolution in-line CD and overlay (IZM-133.1) - PR1191754-3460-P — won by MueTec Automatisierte Mikroskopie und Messtechnik GmbH — Skim