AwardedGermanyGoods
Process Monitoring Tool
- Published
- Published 29 October 2025
- Deadline
- Closed 2 December 2025
Overview
Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- Yes
- Published
- 29 October 2025
- Deadline
- Closed
Miscellaneous special-purpose machinery
Award outcome
- Award date
- 9 January 2026
- Contract period
- 1 June 2026 → 31 July 2026
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
12 January 2026
Contract Notice
29 October 2025
Contracting authority
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Procuring entityErlangen, Germany
EU: 10342
Authority website ↗
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