AwardedGermanyGoods
Ionenstrahltrimanlage
- Published
- Published 12 November 2025
- Deadline
- Closed 12 December 2025
Overview
Ausgeschrieben wurde eine Ionenstrahltrimmanlage, die im Reinraum des PhoQSLabs der Universität Paderborn betrieben werden soll.
Dort wird es die Aufgabe der Maschine sein, photonisch integrierte Schaltkreise in der Dicke zu trimmen. Weiterhin soll die Anlage unterschiedlichste Wafer auf Dicke trimmen, sodass weniger als 1nm Dickenabweichung pro Wafer realisiert werden können.
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- No
- Published
- 12 November 2025
- Deadline
- Closed
Research, testing and scientific technical simulator
Award outcome
- Awarded value
- €922,245
- Award date
- 22 January 2026
- Contract period
- — → 22 May 2026
- scia Systems GmbH
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
26 January 2026
Contract Notice
12 November 2025
Contracting authority
Universität Paderborn
Procuring entityPaderborn, Germany
Authority website ↗
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