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AwardedGermanyGoodsFramework agreement€900,000

Lieferung eines ICP-RIE-Trockenätzers mit Fluor-Chemie einschließlich Nebenleistungen (Wartung und Support)

Published
Published 24 October 2025
Deadline
Closed 3 December 2025

Overview

FBH-2025-0141 Lieferung eines ICP-RIE-Trockenätzers mit Fluor-Chemie einschließlich Nebenleistungen (Wartung und Support)

Key details

Country
Germany
Status
Awarded
Category
Goods
Estimated value
€900,000
Procedure
Open
Contract type
Framework agreement
SME suitable
No
Published
24 October 2025
Deadline
Closed
Classification (CPV)
Dry-etching equipment

Award outcome

Award date
20 March 2026
Contract period
2 March 2026 → 30 June 2027
Winner
  • Oxford Instruments GmbH

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Notice history

Every published notice in this contracting process, newest first.

  1. Contract Award Notice

    31 March 2026

  2. Contract Notice

    24 November 2025

  3. Contract Notice

    24 October 2025

Contracting authority

  • Ferdinand-Braun-Institut gGmbH, Leibniz-Institut für Höchstfrequenztechnik

    Procuring entity

    Berlin, Germany

    Authority website ↗

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Awarded: Lieferung eines ICP-RIE-Trockenätzers mit Fluor-Chemie einschließlich Nebenleistungen (Wartung und Support) — won by Oxford Instruments GmbH — Skim