AwardedGermanyGoods
Standard Cleaning Batch Tool for 130 nm Technology on 200mm Si wafers
- Published
- Published 12 September 2025
- Deadline
- Closed 13 October 2025
Overview
Standard Cleaning Batch Tool for 130 nm Technology on 200mm Si wafers
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- Yes
- Published
- 12 September 2025
- Deadline
- Closed
Microelectronic machinery and apparatus
Award outcome
- Awarded value
- €2,578,500
- Award date
- 6 January 2026
- AP&S International GmbH
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
7 January 2026
Contract Notice
12 September 2025
Contracting authority
IHP GmbH - Leibniz-Institut für innovative Mikroelektronik
Procuring entityFrankfurt (Oder), Germany
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