Inline automatic optical inspection (AOI) with high-speed Analysis for QMI systems

Fraunhofer-Gesellschaft procured a modular, fully automated prober system for optical inspection and electrical contact testing of electronic, photonic, and micro-mechanical devices, capable of handling 200 mm wafers and various substrates with end-to-end carrier handling and automated alignment. The system includes a testcard/probe-card interface, automated probe detection and positioning, programmable sequence control, and a movable mechanical interface for customer-supplied optical inspection modules. aTV Systems GmbH was awarded the contract on 6 July 2026.