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AwardedGermanyGoods

Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes

Published
Published 2 December 2025
Deadline
Closed 16 January 2026

Overview

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik procured batch tool(s) for LPVCD-BTBAS processes involving nitride, oxide, and oxynitride materials. The contract was awarded to ASM Europe B.V. on 26 March 2026.

Key details

Country
Germany
Status
Awarded
Category
Goods
Procedure
Open
SME suitable
Yes
Published
2 December 2025
Deadline
Closed
Classification (CPV)
Machinery for the heat treatment of materialsOvens and accessories

Award outcome

Awarded value
-€1
Award date
26 March 2026
Winner
  • ASM Europe B.V.

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Notice history

Every published notice in this contracting process, newest first.

  1. Contract Award Notice

    27 March 2026

  2. Contract Notice

    2 December 2025

Contracting authority

  • IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

    Procuring entity

    Frankfurt (Oder), Germany

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Awarded: Batch tool(s) for LPVCD-BTBAS (Nitride-, Oxide- and Oxynitride-) processes — won by ASM Europe B.V. — Skim