AwardedGermanyGoods
Lift-Off-Prozesmodul
- Published
- Published 7 April 2025
- Deadline
- Closed 12 May 2025
Overview
Lieferung, Aufbau und Inbetriebnahme von 1 Stück Prozessmodul für die Bearbeitung einzelner Wafer im Lift-Off-Verfahren. Als Prozesschemikalie muss Dimethylsulfoxid (DMSO) verwendet werden. Das DMSO muss aufgeheizt und auf hohen Druck gebracht werden können. Zudem muss hochreines Wasser (DIW) mit 0,055 μS/cm zum Spülen verwendet werden können.
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- No
- Published
- 7 April 2025
- Deadline
- Closed
Laboratory, optical and precision equipments (excl. glasses)
Award outcome
- Awarded value
- €245,000
- Award date
- 16 June 2025
- Robotechnik Europe GmbH
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
29 July 2025
Contract Notice
7 April 2025
Contracting authority
Physikalisch-Technische Bundesanstalt
Procuring entityBerlin, Germany
Authority website ↗
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