AwardedGermanyGoods
Cluster ALE/ICP/RIE + PECVD + ALD (HHI-07) - PR865241-3220-P
- Published
- Published 30 July 2025
Overview
Cluster ALE/ICP/RIE + PECVD + ALD (HHI-07)
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Direct
- Published
- 30 July 2025
Semiconductors
Award outcome
- Awarded value
- -€1
- Award date
- 29 July 2025
- Contract period
- 19 October 2026 → 23 October 2026
- Oxford Instruments
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
30 July 2025
Contracting authority
Fraunhofer-Gesellschaft - Einkauf B12
Procuring entityMünchen, Germany
Authority website ↗
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