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AwardedFranceGoods

Equipement de dépôt LPCVD

Published
Published 16 June 2025

Overview

The Commissariat à l'Énergie Atomique et aux Énergies Alternatives (CEA Grenoble) has procured a compact LPCVD (Low Pressure Chemical Vapor Deposition) system with a single vertical tube for SOI technology research at 10 nm and beyond. The system automatically processes 300 mm wafers for undoped and doped silicon deposition. Tokyo Electron Europe Limited was awarded the contract on 11 May 2026.

Key details

Country
France
Status
Awarded
Category
Goods
Procedure
Limited
Published
16 June 2025
Classification (CPV)
Microelectronic machinery and apparatus

Award outcome

Awarded value
€1
Award date
11 May 2026
Contract period
— → 11 May 2027
Winner
  • TOKYO ELECTRON EUROPE LIMITED

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Notice history

Every published notice in this contracting process, newest first.

  1. Contract Award Notice

    22 May 2026

  2. Contract Notice

    16 June 2025

Contracting authority

  • COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

    Procuring entity

    Grenoble, France

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Awarded: Equipement de dépôt LPCVD — won by TOKYO ELECTRON EUROPE LIMITED — Skim