AwardedGermanyGoods
Hotplate zur Temperung großflächiger Substrate für Elektronenstrahllithografie
- Published
- Published 14 April 2026
- Deadline
- Closed 19 May 2026
Overview
Friedrich-Schiller-Universität Jena procured a semi-automatic hotplate for tempering resist-coated substrates used in high-resolution electron beam lithography, capable of processing 300mm wafers and rectangular glass substrates up to 300×275×15mm with defined pre- and post-bake cycles for chemically amplified resists. The contract was awarded to Notion Systems GmbH on 30 June 2026 for €216,125.
Key details
- Country
- Germany
- Status
- Awarded
- Category
- Goods
- Procedure
- Open
- SME suitable
- No
- Published
- 14 April 2026
- Deadline
- Closed
Laboratory, optical and precision equipments (excl. glasses)
Award outcome
- Awarded value
- €216,125
- Award date
- 30 June 2026
- Notion Systems GmbH
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Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
2 July 2026
Contract Notice
14 April 2026
Contracting authority
Friedrich-Schiller-Universität Jena
Procuring entityJena, Germany
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