Plasma FIB/SEM for room-temperature and cryogenic applications

Paul Scherrer Institut has awarded a plasma FIB/SEM system to FEI Europe B.V. for €1,991,582.51, to be delivered on 15 July 2026. The instrument combines a scanning electron microscope with a focused plasma ion beam source and must operate at both room temperature and cryogenic conditions, with inert gas/vacuum sample transfer capabilities for applications including thin lamella preparation for transmission electron microscopy, cylindrical sample creation for synchrotron X-ray analysis, surface examination, 3D FIB tomography, and prototyping, supplemented by fluorescence light microscopy and energy-dispersive X-ray spectroscopy modules.