AwardedBelgiumGoods
BEOL etch platform
- Published
- Published 3 March 2025
Overview
Its object is the supply and commissioning of a new BEOL Etch Cluster. • 300mm Dry Etch/Strip Platform containing 3 Process Modules as described below: • Metal Dry Etcher capable of Metal, Metal Oxides and various HM (Hard Mask) etches • Deep Si Etcher capable of TSV (Through-Silicon Via) • Dry Stripper or Asher with water vapor passivation capability These Process Modules are targeted for various BEOL Applications from legacy technology nodes up to N3 and beyond. The contract will be awarded based on the best quality-price ratio, the award criteria will be further detailed in the tender documents.
Key details
- Country
- Belgium
- Status
- Awarded
- Category
- Goods
- Procedure
- Limited
- Published
- 3 March 2025
Laboratory, optical and precision equipments (excl. glasses)
Award outcome
- Awarded value
- €0
- Award date
- 1 September 2025
- Contract period
- 1 September 2025 → 31 December 2028
- LAM Research International
Contract ending soon? Skim tracks incumbents and flags recompetes early. Book a demo to set up alerts.
Notice history
Every published notice in this contracting process, newest first.
Contract Award Notice
30 September 2025
Contract Notice
1 April 2025
Contract Notice
3 March 2025
Contracting authority
Imec EU Pilot line NV
Procuring entityHeverlee, Belgium
Get the full picture
AI analysis, bid scoring, and expert strategy for this tender
Skim analyses every tender against your company profile and tells you whether to bid, how to win, and who you are up against.
See which competitors are winning the contracts you're chasing.
15-minute call. We'll pull the win data on your real pipeline and show you what Skim does with it.