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DEUCONTRACT_NOTICE

Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)

Published
Published 12 May 2026
Deadline
Closed 17 June 2026

Overview

The contract involves the supply, installation, and commissioning of an electron beam lithography system designed for high-resolution structuring of micro- and nanostructures. The successful contractor will deliver and set up the specified electron beam lithography equipment and hand it over to the client fully operational. Detailed technical requirements and specifications are provided in the accompanying service description.

Key details

Country
DEU
Notice type
CONTRACT_NOTICE
Published
12 May 2026
Deadline
Closed
Contract lots
1

Contract lots

  • Lieferung, Installierung und Inbetriebnahme einer Elektronenstrahl-Lithografieanlage (E-beam-System).

    Der Auftragnehmer liefert, installiert und übergibt dem Auftraggeber ein definiertes Elektronenstrahl-Lithografiesystem zur hochauflösenden Strukturierung von Mikro- und Nanostrukturen. Eine genaue Beschreibung ist dem Leistungsverzeichnis zu entnehmen.

Contracting authority

  • Kurt-Schwabe-Institut für Mess- und Sensortechnik Meinsberg e.V.

    Waldheim, DEU

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Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System) — Skim